#4 Submitted by Darryl Peters on June 25, 2009 - 3:11pm.
Oxalic acid-containing Cu post-CMP cleaners have been shown to cause Cu dendrites resulting in shorts. Consequently, in addition to its relatively high hazard rating, it has fallen out of favor as a cleaning agent. It is used in the garment industry to remove rust stains from fabric before dying. Oxalic acid displays some wierd characteristics - its ammonium salt is less soluble in water then the acid, which is not terribly soluble itself.
#3 Submitted by Robert Small on April 19, 2008 - 11:19am.
Oxalic acid has been used as a home brew (I believe) for cleaning copper and can be used to clean Fe off of tungsten wafers after polishing with certain peroxide system. Oxalic acid has a low pH (~2) so it can be agressive against copper. Does have a low solublity in some formulations.
Oxalic acid has even been used in some BEOL cleaning formulations.
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Oxalic acid-containing Cu
Oxalic acid has been used as
Oxalic acid has been used as a home brew (I believe) for cleaning copper and can be used to clean Fe off of tungsten wafers after polishing with certain peroxide system. Oxalic acid has a low pH (~2) so it can be agressive against copper. Does have a low solublity in some formulations.
Oxalic acid has even been used in some BEOL cleaning formulations.
I believe some of the work
I believe some of the work by Clarkson U folks as well as UofAz (S. Raghavan) uses oxakic acid for surface cleaning. You might want to check
Has anyone ever tried oxalic
Has anyone ever tried oxalic acid for surface cleaning?