Metrology & Inspection > Hitachi S-4500 SEM

Performance:

Secondary electron image resolution: 1.5 nm at 15kv

Magnification: 20X - 500KX

Electron Optics:

Electron gun: Cold field emmission source

Lens type: electromagnetic

Objective aperture: 4 position externally selectable

Stigmator: Octopole electromagnetic

Scanning coil: 2-stage electromagnetic

Sample Chamber

Size: Type I

Airlock: prepumped, max sample size:50 mm diameter

Stage motion: 5 axis manual

Draw-out door: Max sample size:150 mm dia.

Size: Type II

Airlock: prepumped, max sample size:100 mm or 150 mm diameter

Stage motion: 5 axis manual

Display system:

Image display: Dual 12" monitors

Scanning mode: Normal, reduced area , line scan, photo scan, spot position, split screen

Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame

Signal processing:Real-time processing, auto-brightness and contrast control, dynamic stigmator, sutofocus, a

Frame averaging, frame integration, contrast conversion,

Vacuum system:

Full automatic operation with pneumatic valve control

Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber

Ion pump: 60 L/s X1, 20 L/s X2

Speciment chamber: DP (570 L/s);Turbo Optional

Foreline: Rotary pump X2

Accessories (Optional)

Optional New EDX system: Energy Dispersive X- Ray Spectrometer QUANTAX 200

Digital Image capturing: Orion-6 software, Optional

Chilled water circulator: 10 - 20 deg C, 1.0 -1.5 L/m for DP only

Installation

AC: Single phase AC 220 or 240 volt, 50/60 Hz

Grounding: Independent grounding 100 Ohms or less