Micro Scratches Caused by EBR for thick Cu CMP?

By Ed LaBelle On Apr 22, 2013 Site: CMP Library (Public) Type: Question - # of views: 2074

Hi,

Anyone out there experience micro scratches caused by changing EBR from 2mm to 3mm on incoming thick Cu layer? Could the wider EBR allow for more slurry agglomeration that cause scratches?

Ed